Insulation unit of semiconductor manufacturing apparatus



FIG. 1 is a perspective view of an insulation unit of semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view thereof taken in the direction of line 8-8 in FIG. 2.

The dot-dash broken lines FIG. 2 are for reference purposes only; the broken lines form no part of the claimed design. 

CLAIM I claim the ornamental design for an insulation unit of semiconductor manufacturing apparatus, as shown and described. 